OBTAINING A CATHODE TARGET OF SILICIDES FOR VACUUM ION-PLASMA SOURCES
https://doi.org/10.21122/1683-6065-2018-2-99-102
Abstract
The coatings based on silicides of various metals are widely used in various industries by vacuum-plasma processes for products treatment. The quality of such coatings is determined by the degree of chemical purity of the target cathode, the correct choice of a mixture of process gases and the level of accelerating potential supplied to the substrate. Traditional methods for producing multi-component targets have a number of disadvantages, such as: high residual porosity, excess content of impurities, as well as the need for expensive equipment.
The use of casting technologies in the production of target cathodes is promising. The paper presents the generalized results of experimental studies of manufacturing target cathodes for vacuum ion-plasma sources by methods of reduction and high-speed induction melting. Silicides of titanium, copper and nickel were used as the material.
About the Authors
I. A. Ivanov
Belarusian National Technical University
Belarus
Minsk, 65, Nezavisimosti ave.
Belarus
Minsk, 65, Nezavisimosti ave.
A. G. Slutsky
Belarusian National Technical University
Belarus
Minsk, 65, Nezavisimosti ave.
Belarus
Minsk, 65, Nezavisimosti ave.
V. A. Sheinert
Belarusian National Technical University
Belarus
Minsk, 65, Nezavisimosti ave.
Belarus
Minsk, 65, Nezavisimosti ave.
E. V. Kovalevich
Belarusian National Technical University
Belarus
Minsk, 65, Nezavisimosti ave.
Belarus
Minsk, 65, Nezavisimosti ave.
V. N. Khlebtsevich
Belarusian National Technical University
Belarus
Minsk, 65, Nezavisimosti ave.
Belarus
Minsk, 65, Nezavisimosti ave.
References
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3. Ivanov I. A., Kovalevich Je. V., Slutsky A. G., Sheinert V. A., Kulinich V. A. Issledovanie processa poluchenija splavov metallkremnij dlja izgotovlenija katodov-mishenej [Investigation of the process of obtaining metal-silicon alloys for the production of target cathodes]. Materialy HI Mezhdunarodnoj nauchno-tehnicheskoj konferencii «Sovremennye metody i tehnologii sozdanija i obrabotki materialov», 14–16 sentjabrja 2016 g., Minsk [Materials of the XI International Scientific and Technical Conference «Modern methods and technologies for the creation and processing of materials», September 14–16, 2016, Minsk]. FTI NAN Belarusi Publ., Minsk, 2016.
4. Ivanov I. A., Slutsky A. G., Sheinert V. A., Kovalevich Je. V., Kulinich I. L. Osobennosti poluchenija silicidov dlja izgotovlenija katodov-mishenej [Features of obtaining silicides for the production of target cathodes]. Metallurgija: Respublikanskij mezhvedomstvennyj sbornik nauchnyh trudov = Metallurgy: Republican interdepartmental collection of scientific works, Minsk, BNTU Publ, 2016, Vyp. 37, pp. 98–103.
Review
For citations:
Ivanov I.A., Slutsky A.G., Sheinert V.A., Kovalevich E.V., Khlebtsevich V.N. OBTAINING A CATHODE TARGET OF SILICIDES FOR VACUUM ION-PLASMA SOURCES. Litiyo i Metallurgiya (FOUNDRY PRODUCTION AND METALLURGY). 2018;(2):99-102. (In Russ.) https://doi.org/10.21122/1683-6065-2018-2-99-102
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