Technological features of Ti–Cr–B–N coatings formation by magnetron sputtering method in a direct current
https://doi.org/10.21122/1683-6065-2019-1-112-118
Abstract
The results of the study of the phase composition and physical and mechanical properties of multicomponent coatings Ti– Cr–B–N formed by magnetron sputtering at a constant current from composite targets are presented. The features of phase formation of coatings when spraying targets containing titanium diboride (TiB2) or boron nitride (BN) as a boron-containing component are studied. The conditions of deposition of coatings with microhardness up to 32 GPA and heat resistance up to 800 °C are established.
About the Authors
S. D. Latushkina
Physical-Engineering Institute of the NAS of Belarus
Belarus
Minsk, Belarus, 10, Kuprevicha str
Belarus
Minsk, Belarus, 10, Kuprevicha str
I. M. Romanov
Physical-Engineering Institute of the NAS of Belarus
Belarus
Minsk, Belarus, 10, Kuprevicha str
Belarus
Minsk, Belarus, 10, Kuprevicha str
A. R. Luchenok
Research Institute of Pulse Processes with Pilot Plant, Powder Metallurgy Institute of the NAS of Belarus
Belarus
Belarus
O. I. Posylkina
Physical-Engineering Institute of the NAS of Belarus
Belarus
Minsk, Belarus, 10, Kuprevicha str
Belarus
Minsk, Belarus, 10, Kuprevicha str
Yu. A. Harlan
Physical-Engineering Institute of the NAS of Belarus
Belarus
Minsk, Belarus, 10, Kuprevicha str
Belarus
Minsk, Belarus, 10, Kuprevicha str
Ya. Yu. Martinkevich
Physical-Engineering Institute of the NAS of Belarus
Belarus
Minsk, Belarus, 10, Kuprevicha str
Belarus
Minsk, Belarus, 10, Kuprevicha str
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Review
For citations:
Latushkina S.D., Romanov I.M., Luchenok A.R., Posylkina O.I., Harlan Yu.A., Martinkevich Ya.Yu. Technological features of Ti–Cr–B–N coatings formation by magnetron sputtering method in a direct current. Litiyo i Metallurgiya (FOUNDRY PRODUCTION AND METALLURGY). 2019;(1):112-118. (In Russ.) https://doi.org/10.21122/1683-6065-2019-1-112-118
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