Production of target cathodes from composite silicides for applying protective coatings using casting and deformation technologies
https://doi.org/10.21122/1683-6065-2021-2-68-75
Abstract
The article discusses the results of manufacturing multicomponent consumable cathodes of vacuum electric arc evaporation plants. To obtain ingots of complex silicide as a raw material for the manufacture of target cathodes, it is proposed to use induction melting of pure metal charge materials in an argon atmosphere.
The method made it possible to obtain ingots of complex silicide with a composition close to the calculated one and a density of at least 93 %. Further forming of the cathode takes place when controlling the powder fractions by their percentage ratio with a pressing force of at least 50 tons. The results obtained are compared with the SHS method of manufacturing cathodes of identical composition.
About the Authors
I. A. Ivanov
Belarusian National Technical University
Belarus
Minsk, Belarus, 65, Nezavisimosti Ave.
Belarus
Minsk, Belarus, 65, Nezavisimosti Ave.
A. G. Slutsky
Belarusian National Technical University
Belarus
Minsk, Belarus, 65, Nezavisimosti Ave.
Belarus
Minsk, Belarus, 65, Nezavisimosti Ave.
V. A. Scheinert
Belarusian National Technical University
Belarus
Minsk, Belarus, 65, Nezavisimosti Ave.
Belarus
Minsk, Belarus, 65, Nezavisimosti Ave.
A. I. Ivanov
Belarusian National Technical University
Belarus
Minsk, Belarus, 65, Nezavisimosti Ave.
Belarus
Minsk, Belarus, 65, Nezavisimosti Ave.
A. N. Bely
Belarusian National Technical University
Belarus
Minsk, Belarus, 65, Nezavisimosti Ave.
Belarus
Minsk, Belarus, 65, Nezavisimosti Ave.
References
1. Filonov I. P., Mrochek Zh.A., Ivanov I.A. Perspektivy primenenija vakuumno‑plazmennyh tehnologij v mashinostroenii i instrumental’nom proizvodstve [Prospects for the application of vacuum‑plasma technologies in mechanical engineering and tool production]. Vesci NAN Belarusi. Ser. fiz.-techn. navuk = Proceedings of the National Academy of Sciences of Belarus. Physical-Technical series, 1999, no. 1, pp. 32–40.
2. Plazmenno-vakkuumnye pokrytija [Plasma‑vacuum coatings]. Minsk, UP Tehnoprint Publ., 2004, 369 p.
3. Ivanov I.A., Sluckij A. G., Shejnert V.A. Analiz sostavov i metodov poluchenija katodov‑mishenej iz kremnij soderzhashhih splavov [Analysis of compositions and methods of producing target cathodes from silicon‑containing alloys]. Metallurgija: Respublikanskij mezhvedomstvennyj sbornik nauchnyh trudov = Metallurgy: Republican interdepartmental collection of scientific papers, Minsk, BNTU Publ., 2015, vyp. 36, vol. 1, pp. 190–197.
4. Mrochek Zh.A., Jejzner B.A., Ivanov I.A. Jerozija splavov kremnija s perehodnymi metallami 4‑j gruppy v stacionarnoj vakuumnoj duge [Erosion of silicon alloys with transition metals of the 4th group in a stationary vacuum arc]. Jelektronnaja obrabotka materialov = Electronic material processing, 1991, no.5, pp. 21–24.
5. Pobol’ I. N., Ivanov I.A. Novye metody izgotovlenija katodovmishenej dlja poluchenija mnogokomponentnyh pokrytij [New methods of manufacturing target cathodes for obtaining multicomponent coatings]. Sovremennye materialy, oborudovanie i tehnologija uprochnenija i vosstanovlenija izdelij = Modern materials, equipment and technology for strengthening and restoring products, Novopolock, 1993, 67 p.
6. Ivanov I.A. et al. Tehnologicheskie varianty poluchenija katodov‑mishenej iz silicidov metallov dlja vakuumnyh ionnoplazmennyh istochnikov [Technological options for producing target cathodes from metal silicides for vacuum ion‑plasma sources]. Metallurgija: respublikanskij mezhvedomstvennyj sbornik nauchnyh trudov = Metallurgy: Republican interdepartmental collection of scientific papers, Minsk, BNTU Publ., 2018, vyp. 39, pp. 84–90.
7. Ivanov I.A., Sluckij A. G., Kovalevich Je. V., Shejnert V.A., Kulinich I. L. Issledovanie processa poluchenija splavov metallkremnij dlja izgotovlenija katodov‑mishenej [Investigation of the process of obtaining metal‑silicon alloys for the manufacture of target cathodes]. Materialy XI Mezhdunarodnoj nauchno-tehnicheskoj konferencii «Sovremennye metody i tehnologii sozdanija i obrabotki materialov», 14–16 sentjabrja 2016 g., Minsk [Materials of the XI International Scientific and Technical Conference “Modern Methods and Technologies for the Creation and Processing of Materials”. September 14–16, 2016, Minsk]. Minsk, FTI NAN Belarusi Publ., 2016.
8. Ivanov I.A., Sluckij A. G., Shejnert V.A., Kovalevich Je. V., Kulinich I. L. Osobennosti poluchenija silicidov dlja izgotovlenija katodov‑mishenej [Features of obtaining silicides for the manufacture of target cathodes]. Metallurgija: Respublikanskij mezhvedomstvennyj sbornik nauchnyh trudov = Metallurgy: Republican interdepartmental collection of scientific papers, Minsk, BNTU Publ., 2016, vyp. 37, pp. 98–103.
9. Ivanov I.A. et al. Tehnologicheskie osobennosti poluchenija silicidov na osnove medi, nikelja i titana dlja katodov‑mishenej [Technological features of obtaining silicides based on copper, nickel and titanium for target cathodes]. Metallurgija: respublikanskij mezhvedomstvennyj sbornik nauchnyh trudov = Metallurgy: republican interdepartmental collection of scientific papers, Minsk, BNTU Publ., 2017, vyp. 38, pp. 84–90.
10. Ivanov I.A., Sluckij A. G., Shejnert V.A., Kovalevich Je. V., Hlebcevich V. N. Poluchenie katodov‑mishenej iz silicidov dlja vakuumnyh ionno‑plazmennyh istochnikov [Obtaining target cathodes from silicides for vacuum ion‑plasma sources]. Lit’e i metallurgija = Foundry production and metallurgy, 2018, no. 2(91), pp. 99–102.
11. Ivanov I.A. et al. Osobennosti poluchenija katodov‑mishenej iz kompleksnyh silicidov dlja vakuumnyh ionno‑plazmennyh istochnikov litejno‑deformacionnym metodom [Features of obtaining target cathodes from complex silicides for vacuum ion‑plasma sources by the casting‑deformation method]. Metallurgija: Respublikanskij mezhvedomstvennyj sbornik nauchnyh trudov = Metallurgy: Republican interdepartmental collection of scientific papers, Minsk, BNTU Publ., 2019, vyp. 40, pp. 90–95.
12. Ivanov I.A. et al. Sovershenstvovanie processa poluchenija katodov‑mishenej iz kompleksnyh silicidov dlja vakuumnyh ionnoplazmennyh istochnikov [Improvement of the process of obtaining target cathodes from complex silicides for vacuum ion‑plasma sources]. Metallurgija: Respublikanskij mezhvedomstvennyj sbornik nauchnyh trudov = Metallurgy: Republican interdepartmental collection of scientific papers, Minsk, BNTU Publ., 2020, vyp. 41, vol. 2, pp. 7–14.
Review
For citations:
Ivanov I.A., Slutsky A.G., Scheinert V.A., Ivanov A.I., Bely A.N. Production of target cathodes from composite silicides for applying protective coatings using casting and deformation technologies. Litiyo i Metallurgiya (FOUNDRY PRODUCTION AND METALLURGY). 2021;(2):68-75. (In Russ.) https://doi.org/10.21122/1683-6065-2021-2-68-75
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