For citations:

Ivanov I.A., Slutsky A.G., Sheynert V.A., Bely A.N. An integrated approach to solving the technological problem of obtaining target cathodes from transition metal silicides for vacuum ion‑plasma sources. Litiyo i Metallurgiya (FOUNDRY PRODUCTION AND METALLURGY). 2022;(3):83-90. (In Russ.) https://doi.org/10.21122/1683-6065-2022-3-83-90