For citations:

Ivanov I.A., Slutsky A.G., Sheinert V.A., Kovalevich E.V., Khlebtsevich V.N. OBTAINING A CATHODE TARGET OF SILICIDES FOR VACUUM ION-PLASMA SOURCES. Litiyo i Metallurgiya (FOUNDRY PRODUCTION AND METALLURGY). 2018;(2):99-102. (In Russ.) https://doi.org/10.21122/1683-6065-2018-2-99-102